Phantom RIE ICP Cryo


The Phantom RIE ICP Cryo includes a chuck that can control temperature from -150C to +250C. This wide temperature range chuck allows researches to explore exotic etches not normally available at an affordable price. The system can process up to 8” substrates with good uniformity,

PTek, located at Hyderabad, is engaged in offering best equipment and services to the industry and research institutes in the field of Air Filter Testing, Aerosol generation, Semiconductor Process Equipment & Cryogenic systems.