Minilock – Phantom Duo


As devices become smaller and more sophisticated, the art of Failure Analysis has become increasingly challenging. Trion Technology is pleased to offer a new type of processing tool that combines both dielectric, and metal etching to allow rapid de-processing using complimentary processes.

The Minilock-Phantom Duo is designed to supply failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using both fluorine and chlorine based chemistries.

The Minilock-Phantom Duo allows two independent process modules to be coupled to a Minilock. This increases research capability by not exposing samples to atmosphere between layers.The system can be configured for 8 inch, 300mm, or 450mm chucks in a footprint that is the same as a typical single chamber system from our competitors.Any combination of PR Strip, RIE, PE, ICP or DRIE modules is possible.

PTek, located at Hyderabad, is engaged in offering best equipment and services to the industry and research institutes in the field of Air Filter Testing, Aerosol generation, Semiconductor Process Equipment & Cryogenic systems.